Sequence for vacuum-filling


This sequence is a help function for vacuum-filling. All ABS-valves are normally closed (NC), will be opened 10 times with a frequency of 0.5 Hz.

Note:

Valves that will be affected are 4 outlet valves and 2 reversing (EUV) valves.

Test conditions:

Procedure:

  1. Select function "Sequence for vacuum-filling".

  2. Select "OK" to continue, or "Cancel" to cancel.

  3. The function will perform 10 openings/closings of the valves.

  4. A dialogue box shows "Done", when the sequence is finished.